Search for "magnetron sputter deposition" in Full Text gives 3 result(s) in Beilstein Journal of Nanotechnology.
Beilstein J. Nanotechnol. 2022, 13, 10–53, doi:10.3762/bjnano.13.2
Beilstein J. Nanotechnol. 2017, 8, 2162–2170, doi:10.3762/bjnano.8.215
Beilstein J. Nanotechnol. 2017, 8, 1115–1126, doi:10.3762/bjnano.8.113